High brightness Carbide Tungsten field emission cathode
説明
High brightness and stable cathode has been required for SEM use. We have been studied about Tungsten Carbide (WC) field emission cathode to achieve low-cost and easy to use, high brightness cathode. Tungsten carbide layer is formed on W-FE tip by heating in Ethylene(C 2 H 4 ) gas. This WC field emission cathode indicated low work function.
収録刊行物
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- 2017 30th International Vacuum Nanoelectronics Conference (IVNC)
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2017 30th International Vacuum Nanoelectronics Conference (IVNC) 146-147, 2017-07-01
IEEE