Notice of Removal: Monitoring of morphological change of deposited metallic thin film through internal friction of noncontacting piezoelectric oscillator
説明
During deposition of metallic material on substrate, the morphological change from isolated islands to a continuous film occurs. The nano-structures obtained by stopping deposition around the discontinuous-continuous transition show characteristic electrical properties, and film-growth monitoring techniques are required to obtain the structures. Conductivity measurement and surface acoustic wave method have been used for the purpose, but they require electrodes on the substrate. In this study, we develop a method that can detect the morphological change without using the electrodes.
収録刊行物
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- 2017 IEEE International Ultrasonics Symposium (IUS)
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2017 IEEE International Ultrasonics Symposium (IUS) 1-1, 2017-09-01
IEEE
