Investigation of the sub-micro displacement servo system as sensor apparatus

The measurement system of the precise displacement, and its apparatus using the servo system is proposed. Precise sensor instruments, such as gap or angle sensor, and angular acceleration sensor, hitherto have been developed extensively. However, they are different both in structure and operation principles. In addition, these kind of systems are required to have high resolution. Therefore, the instruments requiring high precision are becoming large-scale systems, and their utilizations are restricted the cost, place and space. To fill the above needs, the servo mechanism, composed of the photo-type gap sensor, power amplifiers, moving-coil, control and operation circuits, is investigated as a simplified angular sensing instrument. The control constants and controllers for the model system are investigated analytically and the effectiveness of this system is verified experimentally. As the general-purpose sensor, the developed system is promising for the advanced measuring instruments of angle, gap, displacement and its principle also can be utilized as accelerating sensing instrument.