Electrostatic inkjet head fabricated by anodization of Si
説明
In this paper, we successfully fabricated the cone-shaped electrostatic inkjet head using anodization and demonstrated the droplet ejection from this head. The dot size was about 50 /spl mu/m in diameter and this value is much larger than that of expected. Optimization of head shape and driving method will enable us to obtain fine droplets.
収録刊行物
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- Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
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Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference 302-303, 2004-05-13
Japan Soc. of Appl. Phys