Angular distribution of cluster atoms due to cluster impact
説明
The high-density effect on the angular distribution of penetrating cluster atoms due to cluster impacts on solid surfaces has been studied by molecular dynamics simulations. MD simulations are performed for (Cu)/sub 201//spl rarr/Pt[111] and (Pt)/sub 201//spl rarr/Cu[111] where the cluster energies are changed from 5 eV to 50 keV per atom. It is found that the high-density formation is strongly dependent on the cluster energy and the mass ratio between a cluster atom and target atom and that the angular distributions of cluster atom are enhanced near /spl theta/=90/spl deg/ for 5 eV/atom Cu cluster.
収録刊行物
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- 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144)
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1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) 2 799-802, 2002-11-28
IEEE
