Elastic Constants and Graphitic Grain Boundaries of Nanocrystalline CVD-Diamond Thin Films: Resonant Ultrasound Spectroscopy and Micromechanics Calculation

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<jats:title>Abstract</jats:title><jats:p>Using resonant-ultrasound spectroscopy coupled with laser-Doppler interferometry, we determine the independent elastic constants of nanocrystalline CVD-diamond thin films with thickness between 2-12 μm. They are deposited on oriented monocrystal silicon substrates by the hot-filament methane/nitrogen CVD method. The diagonal components of the elastic constants are smaller than those of microcrystalline CVD diamond films and bulk diamond. However, the off-diagonal component is larger. We attribute these observations to the presence of <jats:italic>sp</jats:italic><jats:sup>2</jats:sup>-bonded graphitic phase at grain boundaries. A micromechanics model assuming inclusions of thin graphitic plates consistently explains the observations.</jats:p>

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  • MRS Proceedings

    MRS Proceedings 875 2005-01-01

    Springer Science and Business Media LLC

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