Advances in short-wavelength x-ray multilayer optics: toward high-throughput multimirror systems for the wavelengths <10 nm

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This paper presents novel approaches and techniques in development and application of multi-mirror X-ray optical systems operating in the spectral region of "carbon window" (λ ~ 4.5 nm). Two approaches for fabrication of the graded Co/C multilayer mirrors for Schwarzschild objective are presented. A pair of the spherical mirrors with Co/C multilayer coatings was tested in combination with scandium/carbon filters and laser produced plasma X-ray source for stereoimaging of low density materials at λ ~ 4.5 nm.

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