Evaluation of the catalytic metal for the hydrogen sensor using terahertz chemical microscope
説明
To develop the hydrogen sensor, the chemical potential due to the catalytic reaction of the metals are required to evaluate. The platinum and titanium layered electrode on the insulator/semiconductor layered device are fabricated as the test chip. The catalytic reaction of platinum and hydrogen gas were successfully visualized.
収録刊行物
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- 2009 34th International Conference on Infrared, Millimeter, and Terahertz Waves
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2009 34th International Conference on Infrared, Millimeter, and Terahertz Waves 1-2, 2009-09-01
IEEE