Piezoelectric Properties of Lead Zirconate Titanate Films Prepared by Arc Discharged Reactive Ion-Plating Method
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説明
<jats:title>Abstract</jats:title><jats:p>This study is about new plasma deposition method fabricating piezoelectric films applied for actuators in MEMS devices.</jats:p>
収録刊行物
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- MRS Proceedings
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MRS Proceedings 902 2005-01-01
Springer Science and Business Media LLC