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Fabrication of combined structure of silicon single-electron pump with an extra island and MOSFET charge detector
Description
In this paper, we report the fabrication of combined structure of silicon single-electron pump with an extra island and MOSFET charge detector.
Journal
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- Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
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Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference 26-27, 2004-05-06
Japan Soc. of Appl. Phys