New method of photochemical adhesion of fused silica glasses by using Xe2 excimer lamp
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説明
<jats:title>ABSTRACT</jats:title><jats:p>A strong adhesion of two silica glasses or a silica glass and a different glass that creates properties of heatproof, no adhesive strain, and high transmittance in the region of ultraviolet [UV] was demonstrated with photochemical reaction by vacuum-ultraviolet [V-UV] light. It was confirmed that the adhesive strength of the silicone oil between the two silica glasses enhanced to 18 [MPa] after irradiation from 0 [MPa] before irradiation, that of the SiO<jats:sub>2</jats:sub> and BK7 to 12.3 [MPa], and that of the SiO<jats:sub>2</jats:sub> and TEMPAX®, to 10 [MPa], and that of the SiO<jats:sub>2</jats:sub> and CLEARCERAM® to 7.4 [MPa]. Furthermore, the adhesive strain of the bonded sample was measured by 3-dimension roughness meter (ZYGO), and the results showed no adhesive strain. This sample had the bonding strength at 500 degrees Celsius.</jats:p>
収録刊行物
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- MRS Proceedings
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MRS Proceedings 1054 2007-01-01
Springer Science and Business Media LLC