Observation of low energy electron diffraction image and work function of ZrO/W(100) surface
説明
In this paper, the relation between Zr included LEED (low energy electron diffraction) structure and the work function on a modeled ZrO/W surface was investigated.
収録刊行物
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- IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479)
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IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) 115-116, 2004-03-01
Japan Soc. Promotion of Sci