Atomic-Scale Dynamic Deformation Behavior of BN Thin Films

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<jats:title>ABSTRACT</jats:title><jats:p>Deformation behavior of the BN film was dynamically observed by high-resolution transmission electron microscopy. BN thin films were deposited on a narrow edge of Si flakes, using inductively coupled plasma-enhanced chemical vapor deposition. High-resolution observation of the sample revealed that the BN film was possibly deposited on the edge of the Si thinned to less than 10 nm in thickness, whose morphology varied depending on the thickness of the Si edge. Intriguing mechanical properties of the BN films, especially relating their dynamic behavior, were clearly verified by the high-resolution observation with piezo-ceramic tube for three-axis positioning of an indenter.</jats:p>

Journal

  • MRS Proceedings

    MRS Proceedings 750 2002-01-01

    Springer Science and Business Media LLC

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