The first light of a single-stage MEMS x-ray optic

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ABSTRACT The “rst light of a ultra-lig htweight and low-cost micro-pore X-ray optic utilizing MEMS (Micro Electro Me-chanical Systems) technologies is reported. Our idea is to use silicon (111) planes appeared after anisotropic wetetching of silicon wafers. As a “rst step to Wolter type-1 optics, a single-stage optic with a focal length of 750mm and a diameter of 100 mm was designed for energies below 2 keV. The optic consists of 218 mirror chipsfor X-ray re”ection and an optic mount for packing these chips. Design parameters and required fabricationaccuracies were determined with numerical simulations. The fabricated optic satis“ed these accuracies and itsimaging quality was measured at the ISAS X-ray beam line at Al K 1.49 keV. A focused image was successfullyobtained. The measured image size of 4 mm was consistent with the chip sizes. The estimated X-ray re”ectiv-ity also could be explained by micro-roughness of less than 3 nm and geometrical occulting eect due to largeobstacle structures on the re”ection surface.Keywords: X-ray astronomy, X-ray optics, Light weight, MEMS

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