XY-Stage for Scanning Media for Optical Data Storage
説明
XY-stage driven by the electrostatic comb-drive actuator is fabricated realizing long displacement. The actuator is fabricated in one layer of silicon-on-insulator (SOI) wafer, and the media plate is in the other layer. The raster scanning of the plate is realized maintaining orthogonal xy-directions. The fast scanning is y-axis. Two 820times950 mum2-size media plates are driven at the opposite y directions canceling the inertia force. The static maximum displacements are 110 mum (geometrical limit) along x-axis and 90 mum along y-axis. At the resonance, 115 mum (geometrical limit) is obtained along y-axis
収録刊行物
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- IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006.
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IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. 36-37, 2006-01-01
IEEE
