A touch probe sensor using longitudinal vibration of PZT thin film transducer
説明
Touch probe sensors, rod-shaped and flat-type, have been fabricated. These sensors use the longitudinal vibration of PZT thin film transducer. The latter has been improved by miniaturization and using a flat configuration. The characteristics were evaluated by experiments.
収録刊行物
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- 1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102)
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1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102) 1 481-484, 2002-11-27
IEEE
