- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Automatic Translation feature is available on CiNii Labs
- Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
A touch probe sensor using longitudinal vibration of PZT thin film transducer
Description
Touch probe sensors, rod-shaped and flat-type, have been fabricated. These sensors use the longitudinal vibration of PZT thin film transducer. The latter has been improved by miniaturization and using a flat configuration. The characteristics were evaluated by experiments.
Journal
-
- 1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102)
-
1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102) 1 481-484, 2002-11-27
IEEE
