Correlation Between Defects and Electrical Conduction in Surface Conductive Layer of CVD-diamond Films

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<jats:p>Correlation between defects and electrical conduction in surface conductive layers of CVD diamond films has been studied using electron spin resonance ( ESR ) and two points probe technique methods. The ESR analysis revealed the presence of P<jats:sub>ac</jats:sub>-center with spin density of 10<jats:sup>20</jats:sup> spins/cm<jats:sup>3</jats:sup>. The P<jats:sub>ac</jats:sub>-center is composed from two ESR signals: ESR signal from carbon dangling bond with carbon atom neighbors and ESR signal from carbon dangling bond associated with nearest neighbor hole ( hole associated P<jats:sub>ac</jats:sub>-center ). The hole associated P<jats:sub>ac</jats:sub>-center is an electrically active defect.</jats:p>

Journal

  • MRS Proceedings

    MRS Proceedings 442 1996-01-01

    Springer Science and Business Media LLC

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