Meso-moiré fringe observation of nano-particle structures by electron moiré method
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説明
A new method to measure the spacing and direction in the ordered assembled nanoparticles by using the electron Moire new method to measure the spacing and direction in the ordered assembled nanoparticles by using the electron Moire fringes has been developed. In this method an assembled nanoparticle array can be consider as a model grid. When the electron beam was irradiated on the top of the nanoparticles, the amount of secondary electrons per primary electron is quite large. On the other hand, when the electron beam was irradiated on the valley among the neighboring nanoparticles, the amount of secondary electrons per primary electron is smaller. The difference of the generated secondary electrons per a primary electron fabricate periodical bright and dark pattern, which is the electron mesomoire fringes. Using this method, the spacing and orientation of the assembled nanoparticle array was measured. new method to measure the spacing and direction in the ordered assembled nanoparticles by using the electron Moire fringes has been developed. In this method an assembled nanoparticle array can be consider as a model grid. When the electron beam was irradiated on the top of the nanoparticles, the amount of secondary electrons per primary electron is quite large. On the other hand, when the electron beam was irradiated on the valley among the neighboring nanoparticles, the amount of secondary electrons per primary electron is smaller. The difference of the generated secondary electrons per a primary electron fabricate periodical bright and dark pattern, which is the electron mesomoire fringes. Using this method, the spacing and orientation of the assembled nanoparticle array was measured. fringes has been developed. In this method an assembled nanoparticle array can be consider as a model grid. When the electron beam was irradiated on the top of the nanoparticles, the amount of secondary electrons per primary electron is quite large. On the other hand, when the electron beam was irradiated on the valley among the neighboring nanoparticles, the amount of secondary electrons per primary electron is smaller. The difference of the generated secondary electrons per a primary electron fabricate periodical bright and dark pattern, which is the electron mesomoire fringes. Using this method, the spacing and orientation of the assembled nanoparticle array was measured.
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 7522 75220L-, 2009-12-04
SPIE