Proposal of shear stress sensor based on optical detection

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A shear stress sensor based on an optical detection is proposed. The sensor consists of the floating element and the optical 45-degree micro-mirror. It has advantages that it can detect the shear stress directly, and is not sensitive for the electrical noise. The mirror having 45 degree slope is successfully fabricated onto Si{110} surface by applying KOH anisotropic wet etching. The floating element is produced in device layer of SOI wafer, and movement of the element by applying the airflow is also confirmed.

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