New parallel plate interferometer for measuring angular displacement
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説明
A parallel plate interferometer with a reflecting mirror for measuring angular displacement is proposed. A deflection angle of a beam caused by an angular displacement is amplified by use of a reflecting mirror to increase the optical path difference (OPD) in a plane-parallel plate, which provides high sensitivity of phase measurement. Detection of light transmitted through the plane-parallel plate with a position sensitive detector (PSD) enables high accurate measurement of the initial angle of incidence to the plane-parallel plate with insensitivity to stray light. The improved parallel plate interferometer achieves a measurement repeatability of 10 -8 rad.
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 6723 67230Z-, 2007-12-03
SPIE
