Low-loss wide band filters and resonator filters using high-temperature stable high-electromechanical coupling surface acoustic wave substrates using micro-fabrication technology
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説明
SiO2/rotated Y-cut, X-propagating LiNbO3 leaky SAW substrates with a large k2(over 0.2) and zero TCF at a small thickness of SiO2 of H/λ=0.2 (H: SiO2 film thickness, λ: (SAW wave-length) compared to those of other substrates and zero propagation attenuation in the case of metalized surface. Theoretical and experimental results for low-loss filters, resonators and resonator filters are described. The low-loss filters using (FEUDT) showed an insertion loss of below 1dB at a center frequency of 400MHz and bandwidth of 20MHz using micro-fabrication technology. Also, the resonator showed wide-band characteristics and resonator filters showed a bandwidth of 89MHz at a center frequency of 500MHz.© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 5116 864-, 2003-04-25
SPIE