Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application
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説明
We have reported a discharge-produced plasma extreme ultraviolet source based on a pure potassium vapor. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm [full width at halfmaximum (FWHM)]. The current-voltage characteristics of discharge suggest that the source operates in a hollow cathode mode. By comparison with atomic structure calculations, the broadband emission is found to be primarily due to 3d-3p transitions in potassium ions ranging from K 2+ to K 4+ .
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 7802 78020T-, 2010-08-19
SPIE