Deposition of a Diamond-Like-Carbon Film by Ion Plating and Investigation on its Adhesiveness
説明
<jats:p>Diamond-like-carbon (DLC) films are promising as coating materials. Ion plating, an excellent method in terms of adhesiveness, step coverage, and deposition rate, can form not only pure metal films but also oxide films, nitride films, and carbonized films. In this study, which aimed to form a DLC film with good adhesiveness and a diamond crystal structure, a DLC film, with a SiC interlayer formed by ion plating with introduction of tetramethylsilane (TMS), was formed. It was experimentally revealed that as the interlayer thickness increases, the crystal structure in the DLC film becomes more diamond rich, and the adhesiveness of the DLC film and substrate is thereby improved.</jats:p>
収録刊行物
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- Key Engineering Materials
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Key Engineering Materials 749 70-75, 2017-08-11
Trans Tech Publications, Ltd.
