Reliable quadric relationship of frequency turn-over temperature characteristics vs. electrode film thicknesses for quartz crystal tuning forks
説明
A reliable quadric formula for frequency turn-over temperature vs. electrode film thickness in the quartz crystal tuning fork is proposed and the coefficients are experimentally determined by the least squares method. Reliable experiments with respect to frequency temperature characteristics for quartz crystal tuning forks are carried out. In particular, a new analysis for the Young's modulus of the electrode film is also described, and it is expected to be valuable to film technology.
収録刊行物
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- Proceedings of International Frequency Control Symposium
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Proceedings of International Frequency Control Symposium 722-730, 2002-11-23
IEEE