Quantification of Friction Force for Dual-Axis Probe Friction Force Microscope

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<jats:p>Conventional friction force microscopes (FFMs) had the disadvantage of low force sensitivity due to mechanical interference between torsion caused by friction force and deflection by normal force. In order to overcome disadvantage, we developed a dual-axis micro-mechanical probe, which measures the lateral force by the double cantilever and the vertical force by the torsion beam. However, the calibration method of the lateral force has not been established. In this study, we present a new calibration method using a step-structure.</jats:p>

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