Micromechanical fiber optic switches based on electromagnetic torsion mirrors
説明
Summary form only given. Micromachined optical switches are under intensive study for data communication networks and measurement instruments. We have demonstrated electrostatic micro torsion mirrors for fiber optic switches. However, the electrostatic operation required large operation voltage. On the other hand the magnetic operation is expected to realize self-latching optical switches, which hold on/off-state without power consumption. We study the magnetic operation of NiFeCo sputterd torsion mirrors.
収録刊行物
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- 1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369)
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1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369) II/23-II/24, 2002-11-27
IEEE