Deposition and Annealing Studies of Diamond-Like Carbon Grown by Molecular Beam Deposition

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<jats:title>ABSTRACT</jats:title><jats:p>Studies on the electrical conductivity of molecular beam deposited carbon films after annealing of the carbon films have been carried out. Detailed temperature dependence of conductivity on the as-deposited and on annealed samples has been investigated. The results were interpreted in terms of a model which includes a variable range hopping and strongly scattering metallic components. A correlation between annealing behavior of the electrical conductivity and the results of x-ray photoelectron spectroscopy and Raman spectroscopy is presented.</jats:p>

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  • MRS Proceedings

    MRS Proceedings 593 1999-01-01

    Springer Science and Business Media LLC

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