Esr Of Defects In Surface Conduction Layer On Cvd Diamond Films

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<jats:title>ABSTRACT</jats:title><jats:p>Defects in the surface conductive layer of CVD-diamond films have been investigated by ESR method. ESR analysis revealed that defect center ( P<jats:sub>ac</jats:sub>-center: g=2.003, ΔΔ H<jats:sub>pp</jats:sub>=8 Oe ) in the non-diamond phase carbon region exists in the surface conductive layer. The P<jats:sub>ac</jats:sub>-center with a spin density of the order of 10<jats:sup>20</jats:sup>spins/cm<jats:sup>3</jats:sup> or above was formed in the surface layer by hydrogen radical irradiation during the diamond deposition. Formation of the P<jats:sub>ac</jats:sub>-center causes the resistivity of CVD-diamond to decrease ( from 9 × 10<jats:sup>8</jats:sup> Ω to 1.8 × 10<jats:sup>6</jats:sup> Ω )</jats:p>

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  • MRS Proceedings

    MRS Proceedings 416 1995-01-01

    Springer Science and Business Media LLC

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