Fabrication and characterization of periodic nano-faceting structures on patterned vicinal [110] GaAs substrates by MOVPE
説明
Recently, various semiconductor nanoscale structures such as quantum wire (QWR) and quantum dot (QD) structures using self-organizing formation method have been widely studied. This method has the advantage that these structures are formed only by crystal growth. Furthermore, the combination of the self-organizing formation and the pre-patterning on the substrate surface improves the size uniformity and the position control of quantum structures. In this paper, fabrication and characterization of periodic nano-faceting structures grown by metalorganic vapor phase epitaxy (MOVPE) on patterned vicinal substrates is presented.
収録刊行物
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- Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)
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Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) 246-, 2002-11-07
Japan Soc. Appl. Phys