Crystallization of amorphous Sb‐Sn‐O thin films

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Abstract The crystallization of amorphous Sb‐Sn‐O thin films by heat treatment has been investigated. It is found that heat treatment at temperatures higher than 400°C causes the transparent amorphous films to darken and their resistivity to drop by several orders of magnitude. Irradiation of the films with a carbon dioxide laser beam gives rise to local crystallization and selective area darkening.

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