Possible Operation of Periodically Layered Nanocrystalline Porous Silicon as an Acoustic Band Crystal Device

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<jats:title>ABSTRACT</jats:title><jats:p>It is shown that the periodic stacked structures of nanocrystalline porous silicon (nc-PS) layers with controlled densities and elastic properties act as an acoustic band crystal (ABC) device. Supposing that the periodic nc-PS layers are formed by conventional modulated anodization technique to fabricate the multi-layered distributed Brag reflection mirror, the acoustic wave propagation modes are investigated theoretically for various structural parameters. According to the calculation results, a significant acoustic band gaps are generated in the ultrasonic regions due to a big contrast in the elastic constant produced between low-porosity and compact nc-PS layers. The propagation of acoustic wave can be completely suppressed in the characteristic band determined from designed parameters. The present result suggests further possibility of the nc-PS layer as a key component of ABC devices.</jats:p>

Journal

  • MRS Proceedings

    MRS Proceedings 832 2004-01-01

    Springer Science and Business Media LLC

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