Development and progress in thin film Si photovoltaic technologies
説明
Photovoltaic Power Generation Technology Research Association (PVTEC) has organized the consortium of one national research institute and five private companies, which has been supported technically by three universities. It has developed thin film Si PV technologies of improving conversion efficiency and developing a high-productivity Si deposition apparatus. For improving the conversion efficiency, the stabilized efficiency of 10.1% for an a-Si:H cell, 11.0% for a μc-Si cell, and 12.2% with light induced degradation ratio of less than 3% have been achieved, respectively. We have also successfully developed a plasma-enhanced chemical vapor deposition (PECVD) machine, which can deposit high-quality μc-Si films uniformly on a large-scale substrate with high deposition-rate by using very high frequency (VHF) plasma.
収録刊行物
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- 2014 IEEE 40th Photovoltaic Specialist Conference (PVSC)
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2014 IEEE 40th Photovoltaic Specialist Conference (PVSC) 2832-2835, 2014-06-01
IEEE