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Stabilization of the Precision Positioning Stage Working in the Vacuum Environment by Using the Disturbance Observer
Description
The semiconductor inspection equipment using an electron beam in vacuum environment is required high resolution. However, it is difficult to adjust a characteristic of the XY stage working in vacuum chamber. We propose a design method for the XY stage in vacuum environment by using disturbance observer.
Journal
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- The Proceedings of the 4th International Conference on Industrial Application Engineering 2016
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The Proceedings of the 4th International Conference on Industrial Application Engineering 2016 263-268, 2016-01-01
The Institute of Industrial Applications Engineers
