Laser microfabrication of photoresist rod array using a microlens array
説明
Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.
収録刊行物
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- 2005 Pacific Rim Conference on Lasers & Electro-Optics
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2005 Pacific Rim Conference on Lasers & Electro-Optics 1731-1732, 2006-01-18
IEEE