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Gas cleaning technique for batch furnace at Agile-fab concept manufacturing
Description
To satisfy both the quick turn around time and the process compatibility with the current product line at LPCVD process, the mini-batch furnace is one of the reasonable options. For the high tool utility and the capital scalability at small manufacturing line, the minibatch furnaces are required short time and high frequency tool cleaning for the low machine down time and process commonality for different kind of films LPCVD. In this paper, the short time and high frequency tool cleaning is proposed not only for productivity but also for particle controls.
Journal
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- 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)
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2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) 443-446, 2002-11-13
IEEE