Distribution of Refractive Indices of Si-Wire Waveguides Fabricated on a 300 mm SOI Wafer Using ArF Immersion Lithography
書誌事項
- 公開日
- 2014-09-11
- DOI
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- 10.7567/ssdm.2014.b-7-3
- 公開者
- The Japan Society of Applied Physics
収録刊行物
-
- Extended Abstracts of the 2014 International Conference on Solid State Devices and Materials
-
Extended Abstracts of the 2014 International Conference on Solid State Devices and Materials 2014-09-11
The Japan Society of Applied Physics