A Diagnostic System For An Excimer Laser Beam

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An imaging system with a two dimensional photo diode array was developed for the excimer laser beam diagnostics. It is featured with a fast frame rate, high spacial resolution, and responsibity at the uv wave length. With a simple optical set up for the imager, we measured a near and a far field pattern simultaneously and the spectral band width of the consecutive KrF excimer laser pulses at 250Hz. These measurements shows our imaging system possesses enough spacial resolution for the beam pattern and spectral measurements.

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