Micro capillaries array head for direct drawing of fine patterns
説明
Free-space micro ink streams are realized using an array of micro capillaries. Ink is ejected from capillaries accelerated by an electric field with low or no back pressure applied. The capillaries are 20 /spl mu/m in diameter, whereas the micro streams are only a few micrometers thick due to the Taylor cone effect. This method enables one to draw very fine lines without lithographical techniques. By applying an AC field, dotted lines can also be drawn. Direct drawing of both solid and dotted lines have successfully been demonstrated by applying DC and 500 Hz AC fields, respectively.
収録刊行物
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- Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
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Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) 389-392, 2002-11-13
IEEE