Combinatorial approach to exploration of a novel fluid oxide flux stable in vacuum for material processing
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<jats:title>Abstract</jats:title><jats:p>We explored a new fluid flux stabilized even in the vacuum condition at high temperature by combinatorial pulsed laser deposition (PLD) approach. A small amount of CuO doped in BiO<jats:sub>x</jats:sub> was found to effectively stabilize BiO<jats:sub>x</jats:sub> even in 6 Torr O<jats:sub>2</jats:sub> at 800°C. The application of this novel Bi-Cu-O flux to the vacuum process lead to the successful fabrication of a single crystal Bi<jats:sub>4</jats:sub>Ti<jats:sub>3</jats:sub>O<jats:sub>12</jats:sub> film and the establishment of a more reliable process for preparation of an atomically flat LaAlO<jats:sub>3</jats:sub>(001) substrate.</jats:p>
収録刊行物
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- MRS Proceedings
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MRS Proceedings 894 2005-01-01
Springer Science and Business Media LLC