Surface Morphologies and Optical Properties of Homoepitaxial ZnO Grown by Close-Spaced Chemical Vapor Transport
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<jats:title>Abstract</jats:title><jats:p>Chemical vapor transport (CVT) using carbon as a transporting agent is studied for homoepitaxial growth on O-polar ZnO substrates. To increase growth rate at high temperatures, we keep a substrate close to ZnO source powder. Surface smoothness and crystal quality of epilayers are remarkably improved by increasing a substrate temperature. Smooth surfaces are observed on the epilayer grown at substrate temperatures above 920°C.</jats:p>
収録刊行物
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- MRS Proceedings
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MRS Proceedings 1012 2007-01-01
Springer Science and Business Media LLC