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Wafer Level Packaging for MEMS Geiger Counter
Description
The size of conventional Geiger counters is large because the detector (GM tubes: Geiger muller tubes) is fabricated by mechanical processing. In this paper, an MEMS (micro electro mechanical systems) GM tube using a wafer level packaging is proposed. The MEMS-GM tube with glass/Si/glass stacked structure was fabricated by using anodic bonding and polymer bonding. With the supplied voltage of 2.6 kV to the MEMS-GM tube, pulse waves were observed when an radioactive material approached to the fabricated device.
Journal
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- 2012 Fifth International Conference on Emerging Trends in Engineering and Technology
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2012 Fifth International Conference on Emerging Trends in Engineering and Technology 66-69, 2012-11-01
IEEE