Molecular Dynamics Study Of Surface Morphological Evolution By Cluster Impacts
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説明
<jats:title>ABSTRACT</jats:title><jats:p>In order to understand the characteristics of surface modification process with cluster ion irradiation, molecular dynamics simulations of Ar cluster impacting on Si surface with various surface structures were carried out. It was found that the surface morphology is dynamically deformed with only one cluster impact and the impact process of cluster is different depending on the local surface structure. For example, when an Ar<jats:sub>2000</jats:sub> cluster accelerated with 20keV impacted on the convex point of the surface, the hill was compressed and the impact area was smoothed. At the impact on a concave point, a deeper crater was formed compared with the impact on a flat surface. On the other hand, the MD simulations of sequential impacts of large clusters were performed. It was found that the small tip structures on the surface could be removed easily with cluster irradiation. It was shown that surface roughness converges to 15∼20Å and this value agrees with the result obtained by single impact of cluster.</jats:p>
収録刊行物
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- MRS Proceedings
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MRS Proceedings 792 2003-01-01
Springer Science and Business Media LLC