Hysteresis characteristics vs relative humidity for AT-Cut quartz humidity sensors
説明
This paper describes experiments regarding the hysteresis of relative humidity on AT-cut quartz humidity sensors. This research was conducted to investigate principally the mechanism with respect to frequency change, etc. (including the impedance changes and equivalent circuit constant fluctuations) for the above humidity sensors.
収録刊行物
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- Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)
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Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) 492-496, 2002-11-13
IEEE