Depth scanning with wavelength-stepped laser-diode interferometer
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説明
We develop a laser-diode (LD) interferometer for depth profiling. Interference signals are produced by the reflections from the reference mirror and the distributed objects. Four-step current modulation into the LD produces phase shifts with four steps that have a value proportional to the distance from the reference mirror image to the reflection cite and the modulation amplitude. The value of phase shift is gradually increased by changing the amplitude of current modulation. The locations of the reflection cite are measured from the modulation amplitude when the value of phase shifts is suited to π/2.
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 6829 682909-, 2007-11-29
SPIE