- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Automatic Translation feature is available on CiNii Labs
- Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
Erratum: Development of wafer-level-packaging technology for simultaneous sealing of accelerometer and gyroscope under different pressures (2016 <i>J. Micromech. Microeng</i>. <b>26</b> 105007)
Search this article
Journal
-
- Journal of Micromechanics and Microengineering
-
Journal of Micromechanics and Microengineering 27 059601-, 2017-04-11
IOP Publishing
- Tweet
Details 詳細情報について
-
- CRID
- 1872835442871519488
-
- ISSN
- 13616439
- 09601317
-
- Data Source
-
- OpenAIRE