Nanohole Coat/Fill with Pt via Chemical Deposition in Supercritical Fluids
説明
<jats:p>This paper demonstrates nanostructure formation performed by supercritical fluid chemical deposition. Pt was deposited through hydrogen reduction of a Pt chelate being dissolved in supercritical carbon dioxide. Pt was deposited conformally inside nanotrences, however Pt did not grow thick due to a very long incubation time for the nucleation. Interestingly, SFCD Pt grew thick on already-existing noble metals. A two-step SFCD process was employed, where a Pt seed layer was deposited first and Pt was grown thicker in the subsequent run. This enabled to fill Pt in nanotrenches and nanoholes.</jats:p>
収録刊行物
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- Key Engineering Materials
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Key Engineering Materials 617 184-186, 2014-06-01
Trans Tech Publications, Ltd.
