Nanohole Coat/Fill with Pt via Chemical Deposition in Supercritical Fluids

DOI

Description

<jats:p>This paper demonstrates nanostructure formation performed by supercritical fluid chemical deposition. Pt was deposited through hydrogen reduction of a Pt chelate being dissolved in supercritical carbon dioxide. Pt was deposited conformally inside nanotrences, however Pt did not grow thick due to a very long incubation time for the nucleation. Interestingly, SFCD Pt grew thick on already-existing noble metals. A two-step SFCD process was employed, where a Pt seed layer was deposited first and Pt was grown thicker in the subsequent run. This enabled to fill Pt in nanotrenches and nanoholes.</jats:p>

Journal

Details 詳細情報について

Report a problem

Back to top