Enhancement of EUV emission from a liquid microjet target by use of dual laser pulses
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説明
Extreme ultraviolet (EUV) radiation at the wavelength of around 13nm waws observed from a laser-produced plasma using continuous water-jet. Strong dependence of the conversion efficiency (CE) on the laser focal spot size and jet diameter was observed. The EUV CE at a given laser spot size and jet diameter was further enhanced using double laser pulses, where a pre-pulse was used for initial heating of the plasma.
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 5777 613-, 2005-03-23
SPIE