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Electrostatic servo system for multi-axis accelerometers
Description
A multi-axis capacitive accelerometer, using an electrostatic servo system was developed. In this system, an acceleration in three axes (X,Y,Z) is decomposed into its axial components independently and simultaneously by using the synchronous demodulation. The problem of off-axis response was solved by using the electrostatic force balancing to keep the seismic mass in the original position. Typical results achieved for off-axis sensitivity were 1.3-7.3%.
Journal
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- Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
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Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems 251-256, 2002-12-17
IEEE