Evaluation of Damping Ratio in a Glass-Based Guided-Wave Optical Microphone with a Diaphragm

Ohkawa, Masashi, Murata, Kazuya, Sato, Takashi

doi:10.1117/12.910286

説明

In a guided-wave optical microphone with a diaphragm used as a vibration plate, damping of diaphragm vibration is very significant in order to realize broad flat frequency response. In this study, a glass-based guided-wave optical microphone without a damping structure was experimentally examined to evaluate the damping ratio as the first phase in the optimization of damping. Damping ratio and resonance frequency were successfully evaluated to be 0.009 and 3.5 kHz, respectively, for a fabricated microphone with a diaphragm of 20 mm × 20 mm × 0.15 mm.

収録刊行物

Proceedings of SPIE - the International Society for Optical Engineering

Proceedings of SPIE - the International Society for Optical Engineering 8264 82641I-1-82641I-6, 2012-02

International Society for Optical Engineering, SPIE

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詳細情報詳細情報について

CRID: 1050290493061375232

NII論文ID: 120006749103

NII書誌ID: AA10619755

ISSN: 0277786X

DOI: 10.1117/12.910286

HANDLE: 10191/31053

Web Site: https://niigata-u.repo.nii.ac.jp/records/31022

本文言語コード: en

資料種別: conference paper

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